SYSTEMS COMPONENTS SERVICE NEWS PRESS BACKGROUND CONTACT

The Dimensional SEM/FIB

DVD Industry: defect measurements

   

In a SEM it is possible to scan the surface of a DVD (digital video disk) to identify mechanical defects. The following SEM image shows a bit area on the DVD on the left and a zoom into a smaller area that has two scratch shaped defects:


SEM image of a DVD bit area and a zoom showing two scratches

In the following SEM image the two scratches can be visualized and measured in XY, but the depth of the scratches cannot be determined:


SEM image of a DVD bit area and a zoom showing two scratches

The quantitative structure information is visible in the following linescan performed through one of these scratches:


Single linescan across one of the scratches

Only the Dimensional SEM can measure the depth and shape of such defects in DVDs.

Summary:
The Dimensional SEM offers traceable 3D topography with nm precision, inner and outer contour measurements as well as roughness detection inside of a SEM/FIB.
Links:
Downloads:
Library of all publications
Request for additional information
Quick navigation:

back previous pageuptop of page
TOC