A customer from car industry tried to measure small structures in a wet clutch with standard profilometers, optical profilometers and the SEM. None of these measurements could provide a useful quantitative result. Only the Dimensional SEM could deliver profiles and 3D-topography datasets of these structures. These quantitative results are traceable to international scale and roughness standards. The following SEM images show the area of interest but cannot give a height information of these structures:

SEM image of the pattern area and a single imprint field

Next a 3D-scan was performed around one imprint field as identified in the upper right SEM image:

3D-scan around one single imprint field

The quantitative structure information is visible in linescans that can be performed through these structures and deep into the holes:

Single linescan across one of the imprint fields

Only the Dimensional SEM could prove, that within one imprint field each imprint has a different depth. The resolved fine structures offer more information about the production process of the imprint structures and its side effects, like grains around the imprints and material pressed aside.