The NanoFab:

As part of the European research project Nanohand the project partners TESCAN and KLOCKE NANOTECHNIK established a new SEM Demo Lab in Aachen, Germany. It is equipped with the TESCAN High Resolution Schottky FE SEM MIRA with a large XM chamber and several Nanorobotics modules for different applications.

Four closed loop Nanorobotics Manipulators are installed stationary in this FE-SEM by docking stations. A closed loop Nanorobotics sample stage is added to form a complete motion system for manual operation and automation. This Nanorobotics system is so universal to use, that all in-SEM applications described on our website can easily be reached by adding further components or modules.

TESCAN High Resolution Schottky FE SEM MIRA with a large XM chamber and installed Nanorobotics

Learn about the superior properties and the easy usage of our in-SEM/FIB Nanorobotics:

• Handling of manipulators, easy exchange and dual use in air
• Ethernet based control electronics, remote control e.g. by a Notebook
• Automatic tool approach from secure parking positions
• Cartesian movements to address smallest objects easily
• Endeffectors and their usage (Microgripper, current/force probe tips, ...)
• TESCAN 3D-Live Stereo Imaging & cartesian Nanorobotics manipulator: a superior combination for 3D-manipulation
• Teach your own automation sequences

4 docking stations for manipulators fixed stationary around the pole pieces of the MIRA FE-SEM

Application oriented demonstrations are possible e.g. in the fields of:

• Material Research
• Forensic Research
• The Dimensional SEM: non-destructive quantitative 3D surface data
• Tribology
• Mask Repairing
• Nano-handling and assembly

First Nanorobotics workshop on automation of CNT handling (November 22, 2007) with guests from all over Europe

A visit of our SEM Demo Lab is possible after prior consultation: Please contact us for an appointment.

Our Nanorobotics installed in TESCAN SEM/FIB systems are available as turnkey solutions from TESCAN.