SYSTEMS COMPONENTS SERVICE NEWS PRESS BACKGROUND CONTACT
 

SEM Demo Lab

Prove our Technology

     
Live Demonstrations, for example:


Fig.1: Easy manipulator exchange by docking stations


Fig. 2: Manual operation, e.g. by keypads


Fig. 3: Basic Macros for fast operation


Fig. 4: Easy automation by teaching

The NanoFab:

As part of the European research project Nanohand the project partners TESCAN and KLOCKE NANOTECHNIK established a new SEM Demo Lab in Aachen, Germany. It is equipped with the TESCAN High Resolution Schottky FE SEM MIRA with a large XM chamber and several Nanorobotics modules for different applications.


Four closed loop Nanorobotics Manipulators are installed stationary in this FE-SEM by docking stations. A closed loop Nanorobotics sample stage is added to form a complete motion system for manual operation and automation. This Nanorobotics system is so universal to use, that all in-SEM applications described on our website can easily be reached by adding further components or modules.


TESCAN High Resolution Schottky FE SEM MIRA with a large XM chamber and installed Nanorobotics

Learn about the superior properties and the easy usage of our in-SEM/FIB Nanorobotics:

  • Handling of manipulators, easy exchange and dual use in air
  • Ethernet based control electronics, remote control e.g. by a Notebook
  • Automatic tool approach from secure parking positions
  • Cartesian movements to address smallest objects easily
  • Endeffectors and their usage (Microgripper, current/force probe tips, ...)
  • TESCAN 3D-Live Stereo Imaging & cartesian Nanorobotics manipulator: a superior combination for 3D-manipulation
  • Teach your own automation sequences


4 docking stations for manipulators fixed stationary around the pole pieces of the MIRA FE-SEM


Application oriented demonstrations are possible e.g. in the fields of:

  • Material Research
  • Forensic Research
  • The Dimensional SEM: non-destructive quantitative 3D surface data
  • Tribology
  • Mask Repairing
  • Nano-handling and assembly


First Nanorobotics workshop on automation of CNT handling (November 22, 2007) with guests from all over Europe


A visit of our SEM Demo Lab is possible after prior consultation: Please contact us for an appointment.

Our Nanorobotics installed in TESCAN SEM/FIB systems are available as turnkey solutions from TESCAN.


Summary:
A visit of our SEM Demo Lab is possible after prior consultation: Please contact us for an appointment.
Products in this application:
The TESCAN FE-SEM is equipped with:
  • 4 closed loop Nanorobotics manipulators
  • Probe tips, microgrippers, force sensors on demand
  • Application oriented systems
Downloads:
  • SEM-FIB Workbench booklet: on request
Library of all publications
Request for additional information
Quick navigation:

back previous pageuptop of page
TOC