Preparation of TEM-Samples
By Manipulation in a FIB Chamber
The following small images show the antiquated method of lamella handling
with a tilting Nanomanipulator, developed in 1998 by Klocke Nanotechnik:
The preparation of TEM lamellae with manipulators installed inside of Focussed Ion Beam or dual beam chambers came possible in the year 1998, by the tilting Nanomanipulator of Klocke Nanotechnik, see Application paper based on the work of D. Katzer, Fraunhofer Institut für Werkstoffmechanik Halle in the download area on the right and the picture sequence on the left.
Tilting manipulators mix the movement directions during operation, and it is very difficult to hit small objects reliable. Consequently we deveoped our Cartesian Nanorobotics manipulators and gave up selling tilting devices. The following description points out how easy TEM lamella handling can be with our Nanorobotics in automation:Actual Focussed Ion Beam or dual beam chambers include features like pattern recognition of Lamella structures and the MOCVD process to deposit a metal out of a metal-organic gas with the help of the Ion beam: exactly at an area defined in the picture. These features allow an automatic TEM lamella preparation and handling, when the used manipulator is an absolute positioning device and includes software for automation. This is the case for our High Performance Nanorobotics manipulators. The following process describes the advantage of using our system for high throughput TEM Lamella preparation:
Outer sequence to identify a target position:
This degree of automation allows a very fast and precise TEM lamella preparation.
Rely on our long time experience of Nanorobotics and Automation in Scanning Electron/Ion Microscopes!