Examples for assembly tasks:
RF Mixer structure, see: Application KOSMA
Glas fiber guide
Micro adhesive Bonding of SNOM tips
More examples are described at the page "Micro
The Micro Production System developed by Klocke Nanotechnik
and partners bridges the gap between nanotechnology and the classical
mechanical engineering. It combines the advantages of both technologies:
the backlash free movement with Nanometer resolution and the capability
of up to kilograms of load at huge strokes. The included Nanorobotics
modules offer plenty degrees of movement and a repeatability of better
60 nm per axis, a value far away from the Micrometer values of classical
Micro Production System with a 350x350 mm2 base stage and less
The Micro Production System is available in a lot of different levels
of complexity. It was the main goal during the development of this system
to allow for flexibility:
- Modular design, to be able to add, combine, or exchange components
such as force sensors, wafer prober, manipulators, vacuum- and microgrippers
or Scanning Probe Microscopes in order to produce different products,
see on the right, at downloads: "Components".
- Ability to scale-up the production beginning from first manually
assembled samples up to fully automated mass production.
- Integration of micro adhesive bonding
technology in mechanics and software.
- Process control with an easy to use software.
An example shall detail the second option:
The first step to a product is a prototype that has to be assembled. Therefore
our microassembly stages are
the right start, e.g. with 4 Nanorobotics axes (X, Y, Z-stages plus microgripper)
and a joystick. Then about 10-100 prototypes are necessary and some assembly
steps should run automatically, e.g. by integrated position sensors and
a small software packet. An adhesive dispenser may be added, perhaps also
an electrical prober or a Nanofinger.
In the next step a first production series of 1000-5000 pieces needs more
assistance and closed loop operation. Some video cameras and a vision
system help to identify microparts, a base stage and rotary drives arrange
these microparts for the gripper and a sequencer software allows to program
complete assembly processes just by "drag and drop".
When prototypes turn into products quality control gets more important
and the system can be expanded for example with Scanning Probe Microscopes,
nano-indenters, surface inspection systems or wafer prober.
The compatible modules of the Nanorobotics series allows this scale-up
from a single microgripper over small microassembly stages up to a Micro
Production Systems with plenty of different configurations - always with
nano-resolution. In the same way the Ethernet-based electronics and modular
software can grow with the system. This modular design is described in
the PDF file "Components of the Micro Production System" in
the right box at "Downloads".
This concept is the result of the experience in our Microtechnology network
and with a lot of companies who have to overcome the scale-up problem.
The Micro Production system is described in detail in the paper "Nanorobotics
for Production Technology", see "Downloads". This paper
also includes the demands in micro production technology and a comparison
with standard production technology. Our Micro Production System is probably
the most precise system available in the market.
The following lines will summarize some features to give a first impression.
Please contact us when you like to have more information!
Components of the Micro Production System:
- High precision xy-stage , 350x350 mm2 stroke from our
LPKF, resolution better 200 nm.
- Nanorobotics modules , microgripper, Nanofinger, wafer prober,
- Two rotation stages  to change the orientation of the source and
- Micro adhesive dispenser, Nanomanipulators, Scanning Probe Microscopes
or e.g. a MicroProf® from our partner
FRT at position
- Video cameras  with vision software
for pattern recognition of not oriented microparts (orientation and
quality control). Up to 6 cameras are included.
- Process control with graphical user interface. Complex production
sequences can be realized by choosing sensors and actuators from menus.
The Micro Production System can be configured easily
for different applications. Microparts can be assembled with a size of
a few microns up to some centimeters.
- Manual mode with Joysticks.
- Half automatic usage: automatic functions combined with manual operation.
- Completely automatic process with absolute positioning.
- Closed loop process with vision control,
e.g. for the microassembly of not oriented microparts.
The assembly of glass fibers, laser diodes, RF-mixer,
micro systems or the handling of thin wires, gears, SMD-chips, Micro sensors,
Smaller Micro Production System with a 100x100 mm2 base stage
and less Nanorobotics